Images are representations only.
AST SL-900 Liquid Level Sensor
Brand: American Sensor Technologies IncThe Model SL-900 Series Ultrasonic Micro-measurement System is an ideal solution for the detection and measurement of ultra-pure chemical fluids in the semiconductor industries.
The SL-900 Series provides single or multiple discrete point levels with a very high degree of precision. The SL-900 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors.
Features- 316L stainless steel machined sensor body
- Sensor material has an electropolished finish (Ra = 25 μin – minimum)
- Miniature sensor size reduces liquid
- Volume displacement
- Works with the following chemicals independent of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA
- High pressure vessel application up to 250 psig (1724 kPa) (consult factory for higher pressure applications)
- Accuracy of each discrete point level is ±2 mm
- Repeatability of ±1 mm is typical
- Single point low level as close as 1/4" (6 mm) from bottom of vessel for 5/8" tube and 5/16" for 1/2" tube
Specifications
Accuracy
- ± 0.078" (± 2 mm)
Applications
- High Pressure Vessels
- Pharmaceuticals
- Semiconductor Industry
Cable Length
- 3 to 20 ft (0.91 to 6.09 m)
Current
- Sink: 50 mA - Max.
Electrical Contacts
- Normally Closed
- Normally Open (Dry Contacts)
Enclosure Finish
- Electro-Polishing
Environmental Protection
- IP10
- NEMA 1
Input Power
- 115/230 Vac, 50/60 Hz
- 24 Vdc, 50/60 Hz
Insertion 'U' Length
- Standard Sensor Insertion Length: 6" to 12" (15.24 to 30.48 cm), Lengths of 12" to 24" are available at an Additional Charge
Operating Pressure
- psig: 0 to 250 (kPa: 0 to 1,724, bar: 0 to 17.24)
Output
- Relay: 0.5 A
Pressure Range
- bar: 0 to 17.2
- kPa: 0 to 1,724
- psi: 0 to 250
Repeatability
- ± 0.039" (± 1 mm) Typical
Sensor, Probe Material
- Sensor: 316L Stainless Steel
Sensor, Probe Style
- Ultrasonic
Size
- Tube Size: 1/2" O.D.
- Tube Size: 5/8" O.D.
Temperature Range
- Electronics: -29° to 77° C (-20° to 170° F)
- Sensor: -29° to 93° C (20° to 200° F)
VCR / VCO Connection
- 1/2" VCR Female (Nut)
- 1/2" VCR Male (Plug)
- 3/4" VCR Female (Nut)
- 3/4" VCR Male (Plug)
